Characterization of poly- and single-crystal uranium–molybdenum alloy thin films
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چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
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15 صفحه اولResidual Stress of TiNi Shape Memory Alloy Thin Films with (111) Single-crystal Silicon Wafer
As micro-actuator materials, TiNi shape memory alloy thin films with substrate are used more and more in MEMS field. The residual stress in Ti-rich TiNi thin films with silicon substrate prepared by the magnetron-sputtering technique is measured by both X-ray glancing and contour method. The influence of crystallization annealing temperature and film thickness on the residual stress is tested. ...
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 2014
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.11.087